Intelligent all water cooled DC power supply
Advanced Energy Industries, Inc. Adds a fully water-cooled 60kW option to its Ascent Arc Management System (AMS) family of DC generators for precise control of film quality and repeatability, extending an industry-leading system with state-of-the-art software features and the ability to operate in harsh environments.
Ascent AMS II delivers accurate, stable, and repeatable power, supports new material and cathode design process innovation, and allows customers to maximize productivity and reduce costs as the film deposition area grows. Its fully water-cooled design optimizes reliability by preventing external debris from industrial processes from entering the power housing. The operation range of the equipment is expanded, and the process capacity is improved. It also meets the needs of global inputs with just one part number - simplifying tool installation.
Advanced Energy software's embedded Power Insight provides actionable intelligence that can be used to optimize processes to increase throughput and yield and reduce unplanned equipment downtime.
"The pressure to maximize productivity and reduce costs is driving deposition areas to become larger and larger, so higher power levels are required." This increases the potential damage to the end product from the arc, "said Juergen Braun, senior vice president of plasma Power products at Advanced Energy. "Ascent AMS II offers a fully water-cooled power delivery solution that incorporates AE's proven arc management technology and now covers a wider range of operations. With it, customers will be able to process in the harshest conditions and can easily incorporate Ascent AMS II into their next generation system designs."
The power supply is versatile and suitable for a variety of applications. It is particularly suitable for physical vapor deposition processes, including thin films on flat panel displays, glass, solar and other industrial coating applications. The platform can be used directly for DC processes or in combination with Advanced Energy's Ascent DMS (Dual Magnetron Sputtering) for bipolar DC processes.
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